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Clean room vertical carousels from White Systems provide up to a 75% savings of floor space in ISO Class 3 to ISO Class 7 environments. |
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Since 1994 White has been building clean room carousels for major
semiconductor manufacturers. Today there are over 60 units in operation
worldwide. White’s clean room carousels conform to SEMI S2 and S8
Guidelines, and are ETL and CE certified.
Configuration White’s clean room carousels can be configured to handle just about
any storage application. Current configurations include 200mm and 300mm
wafers in SMIF, FOUP, and FOSBY containers, and various forms of reticle
storage. Built-in readers for IR and RF tags, and bar codes can be
supplied that will communicate through the tool’s controller onto the
facility’s network. SEMI E.15.1 manual
White’s clean room carousels may be located inside a clean room, fully utilizing all vertical space from the HEPA grid ceiling to the raised floor base slab. Units can span multiple floor levels to serve as storage devices and vertical lifts. Pass-through units can be located adjacent to a clean room to act as gateways and storage buffers. Freestanding units can be set up as mini-environments. Design White’s clean room carousels take advantage of a facility’s HEPA filtration system for increased economy. Laminar airflow from the facility is directed through the unit to protect stored product from contamination. Special internal baffles isolate the carousel mechanism from the internal storage area – keeping product free of particulates. Pans and equipment surfaces are specially designed to reduce particulate formation. Multiple door units are automatically controlled to allow only one open door at a time and to close the door after the transaction is complete – eliminating accidental cross-zone contamination. White Systems’ clean room carousels incorporate heavy-duty components in a robust design, achieving 99.91% reliability in high activity applications. Applications
Features and Benefits Features
Benefits
Clean Room Carousel Specifications
Frame: Bolt-together modular design. Fully welded side frames and chain tracks. Removable internal isolation baffles. Built-in leveling feet and anchor clips. Externally sealed seams. Pans: Perforated to promote laminar airflow. Single or dual access depending on application. Main opening: 22 inch high opening at front of unit. Automatic door pneumatically operated. Counter: Mounted below main opening at a height of 40 inches from floor. Perforated to promote laminar airflow. Service opening: Lockable access panels at top of unit and below counter. Controller: NEMA-12 style enclosure houses microprocessor control and motor drive at base of unit. Operator interface terminal: Centrally or side mounted keypad with manual E-stop, enable, and jog buttons. Safeties: Lockable disconnect switch, E-stop buttons, light curtain, infrared photo eyes, access panel interlock switches, and motor overload. Drive motor: Internally mounted 5.0 hp continuous duty AC or DC gear motor with spring-set brake. Conveyor mechanism: Heavy duty scissor arm assemblies. Fully enclosed stabilizer track. Three-piece drive shaft. Load chain safety factor: 7. Special lubricant. Finish: Powder coat champagne exterior and interior panels. Special colors available. Internal airflow regulating system: Use to adjust air pressure and flow inside carousel enclosure. Split Side Frame: Two piece side configuration available for through-floor installations. External drive: Drive located outside of carousel enclosure in separate enclosure. Lighting: Fluorescent task lights over counter. Multiple access openings: Up to four openings allow pass-through and/or multiple level operation of carousel. Includes additional controllers, interlocked doors, and counters with or without light bars. Fire protection: NFPA approved fire protection system built into carousel enclosure. Pick-to-light: Indicator lights and/or digital displays built into counter top. Tag readers: Built-in bar code, IR tag, or RF tag readers operate through carousel controller. Communication: RS-232 or Ethernet. Software interfaces: Spectrum Plus inventory control, or custom interface including SECS I, SECSII/GEM.
Emergency crank: Provides safe access to product without climbing ladders or entering the unit. Courtesy outlets: Duplex outlets mount in left or right side post. Step down transformer: Allows unit to operate on 460 V AC. Cleanliness levels: ISO Class 3 to ISO Class 7 Unit capacity: 25,000 pounds, gross load. Pan capacity: 600/800 (optional) pounds maximum. Pan speed: 35 to 40 feet per minute. Maximum imbalance: 3,000 pounds. Duty cycle: 100% continuous duty. Operating temperature: 40º F to 120º F. Power requirements: 208-230 V AC, three-phase, 30 A. As an option, the carousel can use 400-460 V AC, three-phase, 15 A. Compressed air: A 90 PSI compressed air source is required for automatic doors. Airflow: Customer to supply clean laminar airflow to unit. Fire Protection: Pipes and fittings must be type 316 stainless steel. Seismic: Zone 4 anchoring available. May require special anchors and clips depending on height of carousel. Special requirements: All units are ETL listed and can be configured to meet ADA, CE, CSA, Seismic, and SEMI S2 and S8 standards. Additional models and features are available. Consult your local sales representative for details.
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